What's this MEMS

Hello number ! I don't know how you did to find me, but here you are, my small contribution to the ever growing field of Micro- Electro- Mechanical systems or MEMS. My local coordinate in the real world is currently in Singapore at the Nanyang Technological University (NTU), where several MEMS projects are going on... I'm more specifically interested in the optical MEMS or MOEMS, but to be honest I've a lot of interests!
However, do not hope to find here as much stuff... and humor as in my French web page, but as most of my pages are written in Shakespeare's tongue (or something like that :-) I hope this would prove useful to some of you ! And if you want more fun and infos, just start French course :-)
The links are just sorted by category, but you should find the thing you want, and thus avoid some booooring comments :-)
marchemarche pas

MEMS introduction

A gentle introduction for those who don't know what I'm talking about or just get lost but want to know :-)

MEMS philosophy

Kris Pister (UC Berkeley) says right things, listen folks... and behave !

MEMS story

Optical switch for the optical telecommunications -- a survey

MEMS theory

A resonant suspended mass

The electrostatic comb actuator

MEMS process

Release and in-use anti-stiction: SAM coating

Really thick photoresist: EPON SU-8 processing

Polarization of electrostatic actuators with the schematic of a voltage amplifier

MEMS paper

"Improved LiNbO3 technology for reducing sidelobe asymmetry in mode converter-based wavelength filters", Jpn. J. Appl. Phys. part 2, Vol. 37, n. 8B (1998) pp. 979-981[PDF file] : a small trick to improve photolithography on rectangular substrate.

"Compact evanescent optical switch and attenuator with electromechanical actuation", IEEE J. Select. Top. in Quant. Electron., Vol. 5, n. 1 (1999) pp. 52-59 [PDF file in ARJ format part I, II, III, composed from the LaTeX source, slightly different from the printed version]: an optical MEMS mixing integrated optics and microsystem technology, a step toward a compact 2X2 optical switch for commutation matrix.

"Micro-opto-mechanical grating switches", Sensors and Actuators, Vol. 86, (2000) pp. 127134 [PDF in ARJ format part I and II]: a 'not so good' paper... In my opinion, it needs 6 months more work, and confirms that S&A is a journal with high... and low.



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