What's this MEMS
Hello number ! I don't know how you did to find me, but here you are, my small contribution to the ever growing field of Micro- Electro- Mechanical systems or MEMS.
My local coordinate in the real world is currently in Singapore at the Nanyang Technological University (NTU),
where several MEMS projects are going on... I'm more specifically interested in the optical MEMS or MOEMS, but to be honest I've a lot of interests!
However, do not hope to find here as much stuff... and humor as in my French web page, but as most of my pages are written in Shakespeare's tongue (or something like that :-) I hope this would prove useful to some of you ! And if you want more fun and infos, just start French course :-)
The links are just sorted by category, but you should find the thing you want, and thus avoid some booooring comments :-)
A gentle introduction for those who don't know what I'm talking about or just get lost but want to know :-)
Kris Pister (UC Berkeley) says
right things, listen folks... and behave !
Optical switch for the optical telecommunications
-- a survey
A resonant suspended mass
The electrostatic comb actuator
Release and in-use anti-stiction: SAM coating
Really thick photoresist: EPON SU-8 processing
Polarization of electrostatic actuators with
the schematic of a voltage amplifier
"Improved LiNbO3 technology for reducing
sidelobe asymmetry in mode converter-based wavelength filters", Jpn. J. Appl. Phys. part 2, Vol. 37, n. 8B (1998) pp. 979-981[PDF
file] : a small trick to improve photolithography on rectangular substrate.
"Compact evanescent optical switch and attenuator with electromechanical actuation", IEEE J. Select. Top. in Quant. Electron., Vol. 5, n. 1 (1999) pp. 52-59 [PDF file in ARJ format part I, II, III, composed from the LaTeX source, slightly different from the printed version]: an optical MEMS mixing integrated optics and microsystem technology, a step toward a compact 2X2 optical switch for commutation matrix.
"Micro-opto-mechanical grating switches", Sensors and Actuators, Vol. 86, (2000) pp. 127–134 [PDF in ARJ format part I and II]: a 'not so good' paper... In my opinion, it needs 6 months more work, and confirms that S&A is a journal with high... and low.
Want to express your feelings? Don't get frustrated, write me!